Grineviciute, L.Moein, T.Han, M.Ng, S.H.Anand, V.Katkus, T.Ryu, M.Morikawa, J.Tobin, M.JVongsvivut, J.Tolenis, T.2023-07-052023-07-052022https://doi.org/10.1364/OME.451669https://hdl.handle.net/10062/91319This study has demonstrated that 3D columnar micro-films/coatings can be deposited over pre-patterned surfaces with sub-micrometer periodic patterns. Four-angle polarisation analysis of thin (0.4 − 1~μm) Si and SiO2 films, evaporated via glancing angle deposition (GLAD) at 70° to the normal, was carried out in reflection mode using synchrotron infrared microspectroscopy at the Australian Synchrotron. The angular dependence of absorbance followed A(θ) ∝ cos 2θ, confirmed for Si substrates patterned by electron beam lithography and plasma etching, which were used to make checkerboard patterns of Λ = 0.4~μm period on Si. Retardance control by birefringence of a patterned SiO2 substrate coated by columnar SiO2 is promising for UV-visible applications due to the use of the same material to endow polarisation control.enginfo:eu-repo/semantics/openAccessAttribution-NonCommercial-NoDerivatives 4.0 Internationalinfo:eu-repo/semantics/article