Berholts, Artjom, juhendajaJaaniso, Raivo, juhendajaSoosaar, Anna2023-06-142023-06-142023https://hdl.handle.net/10062/90592Graphene and related 2D materials can be used to construct very sensitive gas sensors. In order to achieve high selectivity for detecting different gases, it is necessary to functionalize these materials. In this work, the functionalization is carried out by femtosecond laser treatment. A new fs-laser treatment set-up at the Institute of Physics was tested, and different laser-processed chemiresistive gas sensor chips were studied. The analysis by Raman spectroscopy revealed that the laser-induced defects were created by a two-photon mechanism. The sensitivity of laser-treated sensor chips made on Si/SiO2 substrates increased up to 10 times to 150 ppb of NO2 gas exposure in the air.engembargoedAccessAttribution-NonCommercial-NoDerivatives 4.0 Internationalgraphenelaser treatmentfunctionalizationgas sensorThesis