Anisotropic 3D columnar micro-film coating for applications in infrared and visible spectral ranges

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dc.contributor.authorHu, J.
dc.contributor.authorHan, M.
dc.contributor.authorGrineviciute, L.
dc.contributor.authorNg, S.H.
dc.contributor.authorAnand, V.
dc.contributor.authorKatkus, T.
dc.contributor.authorRyu, M.
dc.contributor.authorMorikawa, J.
dc.contributor.authorTobin, M.J.
dc.contributor.authorVongsvivut, J.
dc.contributor.authorTolenis, T.
dc.date.accessioned2023-07-05T08:13:39Z
dc.date.available2023-07-05T08:13:39Z
dc.date.issued2022
dc.description.abstractPolarisation analysis of thin (∼1 μm) SiO2 films deposited via evaporation at a glancing angle of 70◦ to the normal on resist pillar arrays was carried out using synchrotron-based Fourier transform infrared (s-FTIR) microspectroscopy in reflection mode. Changes in intensity of absorption bands were observed to follow the angular dependence of ∼ cos2 𝜃, consistent with the absorption anisotropy. The strongest absorption was found to be the sharp Si–O–Si stretching vibrational mode at 1040 ± 20 cm−1, which can be used for sensor applications, as well as radiative cooling in the atmospheric transparency window, within the range of 8-13 μm (i.e. 1250-769 cm−1). Anisotropy of IR absorbance is correlated with retardance/birefringence of the same patterns in the visible spectral range. Larger period patterns of 3D columnar SiO2 films of ∼1 μm in thickness deposited on polymer/resist pillar arrays provide the possibility to control anisotropy of the form-birefringent 3D columnar films.et
dc.identifier.urihttps://doi.org/10.1016/j.apsusc.2022.152910
dc.identifier.urihttps://hdl.handle.net/10062/91331
dc.language.isoenget
dc.publisherElsevier B.V.et
dc.relationinfo:eu-repo/grantAgreement/EC/H2020/857627///CIPHRet
dc.relation.ispartofseriesApplied Surface Science;590, p.152910
dc.rightsinfo:eu-repo/semantics/openAccesset
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subjectIR Fingerprint regionet
dc.subjectAtmospheric transparency windowet
dc.subjectBirefringenceet
dc.subjectDichroismet
dc.subjectSculptured thin filmset
dc.titleAnisotropic 3D columnar micro-film coating for applications in infrared and visible spectral rangeset
dc.typeinfo:eu-repo/semantics/articleet

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